Mini CVD Tube Furnace OTF-1200X-S50-2F

Furnace Structure 

Heavy duty steel casing
Energy efficient Al2O3 fibrous thermal insulation

Power Consumption

1.75KW

Temperature

1200 Max. for < 1hr
1100 for continuously heating
Heating rate <= 10C/min

Processing Tube

Quartz tube  50 x 43 x 450mm (O.D x I.D x Length)

Heating Zone

Total heating zone length: 8" (200mm); Constant temp. zone: 2.3" (60mm) (+/-1°C) @ 900 °C.

Temperature Controller

• PID automatic control and auto-tune function.
• 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
• Overheating & broken thermocouple protection.
• Over temperature protection and alarm allows for operation without attendant(s).
• +/- 1 ºC temperature accuracy

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Digital  Vacuum Gauge

• Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases.
• Gauge is installed on the vacuum flange (left side) of tube furnace and provides a wide measure range (10^^-5 ~ 1000 torr).
• Accurate pressure reading with any mixed gases

Two Channel Gas Mixing Station

• Two floating flow meters 16 to 100 mL/min flow rate range
• Three mechanical pressure gauges (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit)
• Vacuum needle valves are made of SS304
• Three Pipe fittings for 1/4" pipe (nylon or stainless steel) on the back panel
• Compact size:  340Lx300Dx 180H mm ( 13.4"x12"x7")
• Net Weight: 14 lbs
• No power required

Vacuum Flanges and Fittings

•          Digital vacuum gauge w/ 0.00001 ~ 1000 torr measurement range
•          1 1/4" swagelok tube connector
•          2 KF-25 quick clamps
•          1 600mm length SS vacuum bellows

Vacuum Pump

• Two step high speed vacuum pump
• Voltage: The voltage of pump will be the same as the tube furnace.
• Pumping rate: 8CFM, 226L/min
• Vaccum level in the furnace system can reach 5x10^-2 torr
• Power: 3/4 HP (500W)
• Oil volume: 1000ml

OTF-1200X-80-I-F3LV-UL

Furnace Construction

• Double layer steel casing with air cooling. 
• Built-in thermostat automatically runs the cooling system when the case temp.  > 55°C.

Power Consumption

2.5 KW

Input Voltage

AC 208-240V Single Phase, 50 or 60 Hz

Maximum Temperature

1200 °C

Continuous workingTemperature

1100 °C

Maximum Heating Rate

<= 20  ^oC /min

Heating Zone Length

400 mm

Constant Temperature Zone

150mm  (+/-1°C)

Temperature Accuracy

+/- 1°C

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Temperature Controllers

• PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
• 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
• Built in PID Auto-Tune function with overheating & broken thermocouple protection.
• Over temperature protection and alarm allows for operation without attendant(s).
• +/- 1 ºC temperature accuracy.
• RS485 Communications Port.         

Tube Size and Materials

Quartz tube: OD: 80mm x  ID: 75 mm x Length: 1000 mm

Digital Vacuum Gauge 

• Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases.
• Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^^-5 ~ 1000 torr).

Vacuum Sealing Flanges

Two stainless steel flanges with both vacuum gauge and valve. The leaking rate of the flange is 6 mtorr/min in max. and 2 mtorr/min in stable conditions.

Note: For the 24 hours curve display the time segment through 08:00:00~21:10:00 in X-axis is skipped over in the chart; therefore, a steep variance is present.

Oxygen Monitoring

An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation.

Vacuum Pump

• 156 L/m Double Stage Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10E-4  torr. 
• Stainless steel hose tube is included for connecting to tube furnace.

Gas Flow Meter and Pressure Meter

• Three gas flow-meters (4% accuracy FS) are installed inside the mobile case to enable monitoring of gas flowing rates (three different kinds of gases in total).

          1) Compact direct read flow meter, 10-100 cc/min.
          2) Compact direct read flow meter, 16-160 cc/min.
          3) Compact direct read flow meter, 25-250 cc/min.

• Four pressure meters are installed inside the mobile cart which are able to monitor three types of flowing gas pressure as well as the pressure of mixing tank.

Valves

Four stainless steel valves are installed in the side panel of mobile cart to control mixing of three inlet gases separately.

1700 ⁰C CVD Furnace System GSL-1700X-F3LV

Tube Furnace

Structure

• Double layer steel casing with air cooling. Two cooling fan inside to keep temperature of outside case < 55°C.
• High purity fibrous alumina insulation for Max, energy saving.

Power Consumption

5kW Max.

Input Voltage

AC 208~240V, Single Phase, 50/60Hz

Max. Heating Temp.

1700°C

Max. Heating Rate

5°C/min

Max. Cooling Rate

5°C/min

Heating Zone Length

455mm (18")

Constant Temp. Zone

150(+/-1C)

Temperature Accuracy

+/-1°C

Temperature Controller

• PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
• 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
• Built in PID Auto-Tune function with overheating & broken thermocouple protection.
• Over temperature protection and alarm allows for operation without attendant(s).
• +/- 1 ºC temperature accuracy.
• RS485 Communications Port

Heating Elements

1800 grade MoSi2   ( 8 pcs )

Tube Materials and Size

• 99.8% high purity Al2O3 ceramic tube
• ID: 72mm x  OD: 80 mm   x 1000 mm length.    

Digital Vacuum Gauge 

• Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases.
• Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^^-5 ~ 1000 torr).

Vacuum Sealing

• Two stainless steel flanges with digital vacuum gauge and valves is included.
• Vacuum pressure can reach 5x10-2 torr via mechanical pump.
• The leaking rate is 6 mtorr/min in max. and 2 in stable,        
  (For a whole 24 hours curve display, the time segment through 08:00:00~21:10:00 in X axis is passed over in the chart, therefore, steep variety in there)

Vacuum Pump and fittings

Vacuum Pump

• Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed inside the vacuum station. vacuum pressure can reach up to 10^-2 Torr. 
• The max. vacuum pressure in the alumina tube furnace is 5x10^-2 torr by using this vacuum mechanical pump. 

Fittings

The standard vacuum fittings include:

• A pair of stainless steel vacuum flange with KF-25 pump connector, two needle valves and one 1/4" swagelok tube connector.
• A 1000mm long KF-25 stainless steel vacuum bellows
• Four KF-25 quick clamps

Gas Flow Meter

• Three gas flow-meters ( 4% accuracy FS) are installed inside mobile case provide monitor to gas flowing rates.

• 1) Compact direct read flow meter, 10-100 cc/min.
• 2) Compact direct read flow meter, 16-160 cc/min.
• 3) Compact direct read flow meter, 25-250 cc/min. 
• One pressure meter is installed inside mobile cart for monitoring the pressure of the mixed gas.
• Four stainless steel needle valve are installed in the front panel to control the gas route independently.

Oxygen Monitoring

An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:

Shipping Info

Product Dimensions

• 80 & 100mm O.D Tube Furnace:    550 x 500 x 700mm L x W x H 
• Gas Mix Station: 600 x 600 x 700mm
• Vacuum station: 600 x 600 x 700mm

New weight

450 lb (in total)

Shipping Dimensions

Two cases in one pallet: 45 x 45 x 35"/ea. case

Shipping Weight

500 lb (in total)

Warranty

One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements
are not covered by the warranty, please order the replacement at related products below.)

Compliance

• CE Certified

Model

OTF-1200X-50-II-4CV-PE-SL-UL

OTF-1200X-80-II-4CV-PE-SL-UL

OTF-1200X-130-III-4CV-PE-SL-UL

Tube Size

2" (50mm) OD x 1.7" ID x 71" L

3.14" (80mm) OD x 2.83" ID x 71'' L 

5" (130mm) OD x 4.8" ID x 79'' L

Max. Temperature

Max 1100ºC for continuous heating

Temperature Controller

Two programmable precision  temp. controllers with 30 segments.

Two programmable precision  temp. controllers with 30 segments.

Three programmable precision  temp. controllers with 30 segments.

Heating Zone

Two separately controlled Heating Zones: 

200mm length for each heating zone

400mm total in heating length

250mm constant central temperature heating area if both zones were heated at the same temperature

Two separately controlled Heating Zones: 

200mm length for each heating zone

400mm total in heating length

250mm constant central temperature heating area if both zones were heated at the same temperature

Three separately controlled Heating Zones: 

200mm length for each heating zone

600mm total in heating length

480mm constant central temperature heating area if all zones were heated at the same temperature

Furnace Structures

•          Split tube furnace with silding rail
•          Multi-programmable precision digital temperature controllers with 30 segments.
•          Input power: 208 – 240V AC input, single phase at max. 4KW

Plasma RF Power Supply

•          Output Power:           5 -500W adjustable with ± 1% stability.
•          RF frequency:           13.56 MHz ±0.005% stability.
•          Reflection Power:       200W max.
•          Matching:                  Automatic
•          RF Output Port:         50 Ω, N-type, female
•          Noise:                       <50 dB.
•          Cooling:                     Air cooling.
•          Power :                      208-240VAC, Single Phase, 50/60Hz

Anti-corrosive Pressure Gauge

•          3.8x10^-5 to 1125 Torr measurement range
•          Anti-corrosive, gas-type independent 
•          High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
•          Fast atmospheric detection eliminates waiting time and shortens process cycle
•          Easy to exchange plug & play sensor element

Vacuum Pump Station and Valves

•          Pfeiffer's High Speed ( 226L/min) Oil-less Dry Vacuum Pump, 10E-3 Torr Limit is installed inside the heavy duty mobile cart
•          KF25 adapter and stainless steel pipe are connected between pump and tube flange with ball valve for customer's plug and play
•          10E-2 Torr vacuum can be achieved inside processing tube     

Mass Flow meters & Gas Mixing Station

It is installed in a heavy duty mobile cart where the tube furnace can be placed on the top.  LCD touch screen is integrated to provide easy control on the gas flow rate of each independent channel.

•          Working Temperature: 5~45 ºC
•          Max. Pressure: 3x10⁶ Pa
•          Accuracy: ±1.5% FS
•          Liner: ±（0.5-1.5）%F.S.
•          Duplicate accuracy: ±0.2%F.S.
•          Controlling Range:
•          Controller 1: 0~100 SCCM
•          Controller 2: 1~199 SCCM
•          Controller 3: 1~199 SCCM
•          Controller 4: 1~499 SCCM

OTF-1200X-4CLV-PE-UL

Max Temperature

• 1200^oC < 60 minutes
• 30 segments programmable precision digital temperature controller
• One pair of vacuum sealed flange with valves
• Input power: 208 – 240V AC input, single phase at max. 4KW

Continuous Working Temperature

• 1100^oC Max for continuous heating

Tube Size

• High purity quartz tube optional from
• 2"OD x 1.7"ID x  48" Length 
• 3.14"OD x 2.83"ID x 48'' Length

Heating Zone Length

• 440 mm length single heating zone and 150 mm length constant temperate zone

Plasma RF Power Supply

• Output Power:          5 -500W adjustable with ± 1% stability
• RF frequency:          13.56 MHz ±0.005% stability
• Reflection Power:     200W max.
• Matching:                Automatic
• RF Output Port:       50 Ω, N-type, female
• Noise:                    <50 dB. 
• Cooling:                  Air cooling.
• Power :                   208-240VAC, 50/60Hz
• Note:                      This RF power supply can accept 50 - 80 mm Max. quartz tube  by changing flange

Anti-corrosive Pressure Gauge

• 3.8x10^-5 to 1125 Torr measurement range
• Anti-corrosive, gas-type independent 
• High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
• Fast atmospheric detection eliminates waiting time and shortens process cycle
• Easy to exchange plug & play sensor element         

  Vacuum Pump and valve

• Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust Systeminstalled in bottom case with max. vacuum pressure 10^-2 torr.
•  KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve
•  Digital vacuum pressure gauge and display are installed with the furnace

Mass Flow meters
     

• Four precision mass flow meters (0.02% accuracy) with digital display are installed on the bottom case to control gas flow rate automatically.
• MFC 1: Gas flow range from 0~100 sccm
• MFC 2&3: Control range from 0~200 sccm  
• MFC 4: Control range from 0~500 sccm
• One gas mixing tank is installed on bottom case with liquid release valve
• 4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually
• Gas inlet fitting: four 1/4NPS
• Gas outlet fitting: four 1/4NPS