CVD

Mini CVD Tube Furnace OTF-1200X-S50-2F
Furnace Structure	Heavy duty steel casing Energy efficient Al2O3 fibrous thermal insulation
Power Consumption	1.75KW
Temperature	1200 Max. for < 1hr 1100 for continuously heating Heating rate <= 10C/min
Processing Tube	Quartz tube 50 x 43 x 450mm (O.D x I.D x Length)
Heating Zone	Total heating zone length: 8" (200mm); Constant temp. zone: 2.3" (60mm) (+/-1°C) @ 900 °C.
Temperature Controller	PID automatic control and auto-tune function. 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Overheating & broken thermocouple protection. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Digital Vacuum Gauge	Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases. Gauge is installed on the vacuum flange (left side) of tube furnace and provides a wide measure range (10^^-5 ~ 1000 torr). Accurate pressure reading with any mixed gases
Two Channel Gas Mixing Station	Two floating flow meters 16 to 100 mL/min flow rate range Three mechanical pressure gauges (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit) Vacuum needle valves are made of SS304 Three Pipe fittings for 1/4" pipe (nylon or stainless steel) on the back panel Compact size: 340Lx300Dx 180H mm ( 13.4"x12"x7") Net Weight: 14 lbs No power required
Vacuum Flanges and Fittings	Digital vacuum gauge w/ 0.00001 ~ 1000 torr measurement range 1 1/4" swagelok tube connector 2 KF-25 quick clamps 1 600mm length SS vacuum bellows
Vacuum Pump	Two step high speed vacuum pump Voltage: The voltage of pump will be the same as the tube furnace. Pumping rate: 8CFM, 226L/min Vaccum level in the furnace system can reach 5x10^-2torr Power: 3/4 HP (500W) Oil volume: 1000ml

OTF-1200X-80-I-F3LV-UL
Furnace Construction	Double layer steel casing with air cooling. Built-in thermostat automatically runs the cooling system when the case temp. > 55°C.
Power Consumption	2.5 KW
Input Voltage	AC 208-240V Single Phase, 50 or 60 Hz
Maximum Temperature	1200 °C
Continuous workingTemperature	1100 °C
Maximum Heating Rate	<= 20 ^oC /min
Heating Zone Length	400 mm
Constant Temperature Zone	150mm (+/-1°C)
Temperature Accuracy	+/- 1°C
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Temperature Controllers	PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor. 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built in PID Auto-Tune function with overheating & broken thermocouple protection. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy. RS485 Communications Port.
Tube Size and Materials	Quartz tube: OD: 80mm x ID: 75 mm x Length: 1000 mm
Digital Vacuum Gauge	Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases. Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^^-5 ~ 1000 torr).
Vacuum Sealing Flanges	Two stainless steel flanges with both vacuum gauge and valve. The leaking rate of the flange is 6 mtorr/min in max. and 2 mtorr/min in stable conditions. Note: For the 24 hours curve display the time segment through 08:00:00~21:10:00 in X-axis is skipped over in the chart; therefore, a steep variance is present.
Oxygen Monitoring	An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation.
Vacuum Pump	156 L/m Double Stage Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10E-4 torr. Stainless steel hose tube is included for connecting to tube furnace.
Gas Flow Meter and Pressure Meter	Three gas flow-meters (4% accuracy FS) are installed inside the mobile case to enable monitoring of gas flowing rates (three different kinds of gases in total). 1) Compact direct read flow meter, 10-100 cc/min. 2) Compact direct read flow meter, 16-160 cc/min. 3) Compact direct read flow meter, 25-250 cc/min. Four pressure meters are installed inside the mobile cart which are able to monitor three types of flowing gas pressure as well as the pressure of mixing tank.
Valves	Four stainless steel valves are installed in the side panel of mobile cart to control mixing of three inlet gases separately.

1700 ⁰C CVD Furnace System GSL-1700X-F3LV
Tube Furnace	Structure	Double layer steel casing with air cooling. Two cooling fan inside to keep temperature of outside case < 55°C. High purity fibrous alumina insulation for Max, energy saving.
	Power Consumption	5kW Max.
	Input Voltage	AC 208~240V, Single Phase, 50/60Hz
	Max. Heating Temp.	1700°C
	Max. Heating Rate	5°C/min
	Max. Cooling Rate	5°C/min
	Heating Zone Length	455mm (18")
	Constant Temp. Zone	150(+/-1C)
	Temperature Accuracy	+/-1°C
	Temperature Controller	PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor. 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built in PID Auto-Tune function with overheating & broken thermocouple protection. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy. RS485 Communications Port
	Heating Elements	1800 grade MoSi2 ( 8 pcs )
	Tube Materials and Size	99.8% high purity Al2O3 ceramic tube ID: 72mm x OD: 80 mm x 1000 mm length.
	Digital Vacuum Gauge	Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases. Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^^-5 ~ 1000 torr).
	Vacuum Sealing	Two stainless steel flanges with digital vacuum gauge and valves is included. Vacuum pressure can reach 5x10-2 torr via mechanical pump. The leaking rate is 6 mtorr/min in max. and 2 in stable, (For a whole 24 hours curve display, the time segment through 08:00:00~21:10:00 in X axis is passed over in the chart, therefore, steep variety in there)
Vacuum Pump and fittings	Vacuum Pump	Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed inside the vacuum station. vacuum pressure can reach up to 10^-2 Torr. The max. vacuum pressure in the alumina tube furnace is 5x10^-2 torr by using this vacuum mechanical pump.
Vacuum Pump and fittings	Fittings	The standard vacuum fittings include: A pair of stainless steel vacuum flange with KF-25 pump connector, two needle valves and one 1/4" swagelok tube connector. A 1000mm long KF-25 stainless steel vacuum bellows Four KF-25 quick clamps
Gas Flow Meter	Three gas flow-meters ( 4% accuracy FS) are installed inside mobile case provide monitor to gas flowing rates. 1) Compact direct read flow meter, 10-100 cc/min. 2) Compact direct read flow meter, 16-160 cc/min. 3) Compact direct read flow meter, 25-250 cc/min. One pressure meter is installed inside mobile cart for monitoring the pressure of the mixed gas. Four stainless steel needle valve are installed in the front panel to control the gas route independently.
Oxygen Monitoring	An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
Shipping Info	Product Dimensions	80 & 100mm O.D Tube Furnace: 550 x 500 x 700mm L x W x H Gas Mix Station: 600 x 600 x 700mm Vacuum station: 600 x 600 x 700mm
	New weight	450 lb (in total)
	Shipping Dimensions	Two cases in one pallet: 45 x 45 x 35"/ea. case
	Shipping Weight	500 lb (in total)
Warranty	One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
Compliance	CE Certified