PECVD

 

Model

OTF-1200X-50-II-4CV-PE-SL-UL

OTF-1200X-80-II-4CV-PE-SL-UL

OTF-1200X-130-III-4CV-PE-SL-UL

Tube Size

2" (50mm) OD x 1.7" ID x 71" L

3.14" (80mm) OD x 2.83" ID x 71'' L 

5" (130mm) OD x 4.8" ID x 79'' L

Max. Temperature

Max 1100ºC for continuous heating

 

Temperature Controller

Two programmable precision  temp. controllers with 30 segments.

Two programmable precision  temp. controllers with 30 segments.

 

Three programmable precision  temp. controllers with 30 segments.

Heating Zone

Two separately controlled Heating Zones: 

200mm length for each heating zone

400mm total in heating length

250mm constant central temperature heating area if both zones were heated at the same temperature

Two separately controlled Heating Zones: 

200mm length for each heating zone

400mm total in heating length

250mm constant central temperature heating area if both zones were heated at the same temperature

Three separately controlled Heating Zones: 

200mm length for each heating zone

600mm total in heating length

480mm constant central temperature heating area if all zones were heated at the same temperature

Furnace Structures
  •          Split tube furnace with silding rail
  •          Multi-programmable precision digital temperature controllers with 30 segments.
  •          Input power: 208 – 240V AC input, single phase at max. 4KW

Plasma RF Power Supply

 
  •          Output Power:           5 -500W adjustable with ± 1% stability.
  •          RF frequency:           13.56 MHz ±0.005% stability.
  •          Reflection Power:       200W max.
  •          Matching:                  Automatic
  •          RF Output Port:         50 Ω, N-type, female
  •          Noise:                       <50 dB.
  •          Cooling:                     Air cooling.
  •          Power :                      208-240VAC, Single Phase, 50/60Hz

Anti-corrosive Pressure Gauge
  •          3.8x10-5 to 1125 Torr measurement range
  •          Anti-corrosive, gas-type independent 
  •          High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  •          Fast atmospheric detection eliminates waiting time and shortens process cycle
  •          Easy to exchange plug & play sensor element

Vacuum Pump Station and Valves

 
  •          Pfeiffer's High Speed ( 226L/min) Oil-less Dry Vacuum Pump, 10E-3 Torr Limit is installed inside the heavy duty mobile cart
  •          KF25 adapter and stainless steel pipe are connected between pump and tube flange with ball valve for customer's plug and play
  •          10E-2 Torr vacuum can be achieved inside processing tube     

Mass Flow meters & Gas Mixing Station

    

It is installed in a heavy duty mobile cart where the tube furnace can be placed on the top.  LCD touch screen is integrated to provide easy control on the gas flow rate of each independent channel.

  •          Working Temperature: 5~45 ºC
  •          Max. Pressure: 3x106 Pa
  •          Accuracy: ±1.5% FS
  •          Liner: ±（0.5-1.5）%F.S.
  •          Duplicate accuracy: ±0.2%F.S.
  •          Controlling Range:
  •          Controller 1: 0~100 SCCM
  •          Controller 2: 1~199 SCCM
  •          Controller 3: 1~199 SCCM
  •          Controller 4: 1~499 SCCM

 

 

 

 

OTF-1200X-4CLV-PE-UL

Max Temperature
  • 1200oC < 60 minutes
  • 30 segments programmable precision digital temperature controller
  • One pair of vacuum sealed flange with valves
  • Input power: 208 – 240V AC input, single phase at max. 4KW

Continuous Working Temperature
  • 1100oC Max for continuous heating

Tube Size
  • High purity quartz tube optional from
    • 2"OD x 1.7"ID x  48" Length 
    • 3.14"OD x 2.83"ID x 48'' Length

Heating Zone Length
  • 440 mm length single heating zone and 150 mm length constant temperate zone

Plasma RF Power Supply
  • Output Power:          5 -500W adjustable with ± 1% stability
  • RF frequency:          13.56 MHz ±0.005% stability
  • Reflection Power:     200W max.
  • Matching:                Automatic
  • RF Output Port:       50 Ω, N-type, female
  • Noise:                    <50 dB. 
  • Cooling:                  Air cooling.
  • Power :                   208-240VAC, 50/60Hz
  • Note:                      This RF power supply can accept 50 - 80 mm Max. quartz tube  by changing flange

Anti-corrosive Pressure Gauge
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element         

  Vacuum Pump and valve

 
  • Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust Systeminstalled in bottom case with max. vacuum pressure 10-2 torr.
  •  KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve
  •  Digital vacuum pressure gauge and display are installed with the furnace

Mass Flow meters
     
  • Four precision mass flow meters (0.02% accuracy) with digital display are installed on the bottom case to control gas flow rate automatically.
  • MFC 1: Gas flow range from 0~100 sccm
  • MFC 2&3: Control range from 0~200 sccm  
  • MFC 4: Control range from 0~500 sccm
  • One gas mixing tank is installed on bottom case with liquid release valve
  • 4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually
  • Gas inlet fitting: four 1/4NPS
  • Gas outlet fitting: four 1/4NPS