GSL-1100X-SPC12H

GSL-1100X-SPC12

SPC16-3-220

Specimen Chamber

Fused glass chamber, 100 mm Dia. x 130mm H

Quartz heat insulation Shield

Fused glass tube, 150 mm I.D. Dia x 150mm Height

Specimen Stage

Built in 60 Diam. susbtrate heater (up to 750°C)

One 30-segment programmable precision temperature controller

Height of substrate heater is adjustable

40 Dia. (Can coating 6 SEM sample on one stage)

Height of the stage is adjustable

One 50mm Dia. sample stage, which can be rotated in three positions by pushing a button.

Target Size

4N purity Gold foil:  57 mm dia. x 0.12 mm 

1pcs Au target: 47 mm dia. x 0.12 mm,

1pcs Cu target: 47 mm dia. x 0.12 mm,

1pcsAl target:  47 mm dia. x  0.12 mm

Substrate Heater

• Built in 60 Diam. susbtrate heater (up to 600°C)
• One 30-segment programmable precision temperature controller is included with +/-1ºC accuracy (click the second picture from the left) to see detail specs.
• Recommended heating rate:15°C/m
• Height of substrate heater is adjustable

• One 50mm Dia. sample stage, which can be rotated in three positions by pushing a button.
• The substrate heater is built in the stage with a max. heating temperature of 500°C
• PID temperature controller with +/-1°C accuracy is built in touch screen control panel 

Vacuum Accessories

Vane rotary vacuum pump 2L/sec ( external ) with Pirani gauge vapor trap can prevent streaming of oil get back into the  vacuum chamber

120 L/m  Rotary Vane Vacuum Pump (external) with Pirani gauge vapor trap prevent oil streaming get back into the vacuum chamber