 |
 |
 |
VTC series compact spin coater with vacuum chucksdesigned for easy and quick coating via sol-gel for wafers up to 8". The spinning speed is variable from 500-8000 rpm with programmable segments. The package comes included with complete accessories for immediate use.
|
|
VTC-200P |
VTC-100C-LD |
|
|
Vacuum chuck |
4 set of vacuum chuck with different sizes (21mm,38mm, 60mm, 100mm) |
Three sets of nylon anti-corrosive vacuum chucks with different sizes( 25mm, 32mm, 45mm) |
Two sets of Natural PP anti-corrosive vacuum chucks/adapter for holding substrate upto 160mm diameter. Vacuum Chuck From Ø45mm up to Ø160mm (included) Fragment Adapter for fragments (Ø >10mm up to <1”) of Semi Standard Wafer, 300-700µm (included) |
|
Spin Speed |
500-8000 RPM |
5-8000 RPM |
1-10000 RPM |
|
Controller |
2 programmable segments of different spin times and speeds |
Digital control panel can store 9 programs and each program has 9 segments programmable for speed, acceleration, and spin duration |
Storage of unlimited programs of unlimited steps of ± 0.1 seconds minimum each
|
|
Gas inlet |
6mm diameter gas inlet port allows customers to fill desire gases into the chamber, which can make coating under various gas environment |
||
NPG-X1
|
Micro-controller Controlled |
Yes |
|
Programmable Speed Range
|
100-10,000 R.P.M. *Based on a Glass Substrate of Dimension 1.5" (L) X 1" (W) & Thickness 0.05"+ |
|
Speed Accuracy |
<±1% Error across the Full Speed Range |
|
Acceleration
|
40-5,000 R.P.M. / sec. [Based on a Glass Substrate of Dimension 1.5" (L) X 1" (W) & Thickness 0.05"+ |
|
Duration |
1-9,999 sec. / Step |
|
Preset Editable Programs |
2 |
|
Steps/Program |
10 Steps/ Program |
|
Real-time Display of R.P.M., Timing & Program Status |
On 4 Line LCD Console
|
|
Input & Controlling |
Through Key-pad |
|
Working Chamber |
Teflon coated 8" Diameter |
|
Power On / Off Switch |
Yes |
|
Vacuum Release Switch |
Yes |
|
Calibration Option |
Yes |
|
Spill-drainage Facility |
Yes |
|
Inert Gas Purging Facility |
Yes |